Determination of metrological structural resolution of a CT system using the frequency response on surface structures
Fleßner Matthias, Vujaklija Nemanja, Helmecke Eric, Hausotte Tinodimensional metrology, computed tomography, structural resolution, frequency response, spatial frequency
| Document type | Proceedings |
| Journal title / Source | Macroscale 2014 |
| Publication date | 2014 |
| Conference name | Macroscale 2014 |
| Conference date | 28-30 October, 2014 |
| Conference place | Vienna |
| DOI | 10.7795/810.20150223B |
| Language | English |