Characterization of PillarHall test chip structures using a reflectometry technique

Danilenko A., Rastgou M., Manoocheri F., Kinnunen J., Korpelainen V., Lassila A., Ikonen E.

reflectometry, PillarHall, modeling, conformal thin film

Document type Article
Journal title / Source Measurement Science and Technology
Volume 34
Issue 9
Page numbers / Article number 094006
Publisher's name IOP Publishing
Publisher's address (city only) Bristol, United Kingdom
Publication date 2023-6-19
ISSN 0957-0233, 1361-6501
DOI 10.1088/1361-6501/acda54
Language English

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