On-Wafer Broadband Microwave Measurement of High Impedance Devices-CPW Test Structures with Integrated Metallic Nano-Resistances

Daffé K., Mubarak F., Mascolo V., Votsi H., Ridler N.M., Dambrine G., Roch I., Haddadi K.

S-parameters, microwave, uncertainty, on-wafer,

Document type Proceedings
Journal title / Source 2018 48th European Microwave Conference (EuMC)
Page numbers / Article number 25-28
Publisher's name IEEE
Publication date 2018-11
Conference name EuMC 2018
Conference date 23-09-2018 to 27-09-2018
Conference place Madrid
DOI 10.23919/EuMC.2018.8541607
Web URL https://hal.archives-ouvertes.fr/hal-02056825
Language English

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