Influence of electron landing energy on the measurement of the dimensional properties of nanoparticle populations imaged by SEM
Crouzier L., Delvallée A., Devoille L., Artous S., Saint-Antonin F., Feltin N., Hodoroaba V-D.SEMElectron landing energyNanoparticlesDimensional propertiesMetrology
Document type | Article |
Journal title / Source | Ultramicroscopy |
Volume | 226 |
Issue | July |
Page numbers / Article number | 113300 |
Publisher's name | Elsevier BV |
Publication date | 2021-7 |
ISSN | 0304-3991 |
DOI | 10.1016/j.ultramic.2021.113300 |
Web URL | https://reader.elsevier.com/reader/sd/pii/S0304399121000875?token=909C79CE3C3F38B3A66DB9C19F03753326F07A8C27AA6D2752B29C970B6044F466C12F79E394D396CE7598E6F1497E2E&originRegion=eu-west-1&originCreation=20210517160957 |
Language | English |