Lens aberration compensation in interference microscopy

Su R., Thomas M., Liu M., Drs J., Bellouard Y., Pruss C., Coupland J., Leach R.

Lens aberration interference microscopy

Document type Article
Journal title / Source Optics and Lasers in Engineering
Volume 128
Page numbers / Article number 106015
Publisher's name Elsevier BV
Publisher's address (city only) Elsevier BV Radarweg 29 Amsterdam NX 1043 Netherlands
Publication date 2020-5
ISSN 0143-8166
DOI 10.1016/j.optlaseng.2020.106015
Language English

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