Effects of defocus on the transfer function of coherence scanning interferometry

Su R., Thomas M., Leach R., Coupland J.

Imaging systems , Interferometry, Metrology , Calibration , Microscopy, Aberrations

Document type Article
Journal title / Source Optics Letters
Volume 43
Issue 1
Page numbers / Article number 82
Publisher's name The Optical Society
Publication date 2017-12-21
ISSN 0146-9592, 1539-4794
DOI 10.1364/OL.43.000082
Web URL https://www.osapublishing.org/ol/fulltext.cfm?uri=ol-43-1-82
Language English

Back to the list view