Comprehensive Comparison of Various Techniques for the Analysis of Elemental Distributions in Thin Films: Additional Techniques

Abou-Ras DAR, Caballero RC, Streeck CS, Beckhoff BB, In JHI, Jeong SJ

elemental distributions, thin films, laser-induced breakdown spectroscopy, grazing-incidence X-ray fluorescence analysis, comparison

Document type Article
Journal title / Source Microscopy and Microanalysis
Peer-reviewed article 1
Volume 21
Issue 6
Page numbers / Article number 1644-1648
Publisher's name Cambridge University Press (CUP)
Publication date 2015-9-14
ISSN 1431-9276
DOI 10.1017/S1431927615015093
Language English

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