Reconstruction of sub-wavelength features and nano-positioning of gratings using coherent Fourier scatterometry

Coene W.M.J., Pereira S.F., Roy S., El Gawhary O., Ramanandan G.K.P., Petrik P., Kumar N., Urbach H.P.

sub-wavelength nano-positioning gratings coherent Fourier scatterometry

Document type Article
Journal title / Source Optics Express
Volume 22
Issue 20
Page numbers / Article number 24678
Publisher's name The Optical Society
Publication date 2014-10
ISSN 1094-4087
DOI 10.1364/OE.22.024678
Language English

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