Reconstruction of sub-wavelength features and nano-positioning of gratings using coherent Fourier scatterometry
Coene W.M.J., Pereira S.F., Roy S., El Gawhary O., Ramanandan G.K.P., Petrik P., Kumar N., Urbach H.P.sub-wavelength nano-positioning gratings coherent Fourier scatterometry
| Document type | Article |
| Journal title / Source | Optics Express |
| Volume | 22 |
| Issue | 20 |
| Page numbers / Article number | 24678 |
| Publisher's name | The Optical Society |
| Publication date | 2014-10 |
| ISSN | 1094-4087 |
| DOI | 10.1364/OE.22.024678 |
| Language | English |