Excellent Responsivity and Low Dark Current Obtained With Metal-Assisted Chemical Etched Si Photodiode
Chen K., Setälä O.E., Liu X., Radfar B., Pasanen T.P., Serué M.D., Heinonen J., Savin H., Vähänissi V.MACE, photodetector, responsivity, Si
| Document type | Article |
| Journal title / Source | IEEE Sensors Journal |
| Volume | 23 |
| Issue | 7 |
| Page numbers / Article number | 6750 |
| Publication date | 2023-4 |
| DOI | 10.1109/JSEN.2023.3246505 |
| Web URL | https://ieeexplore.ieee.org/stamp/stamp.jsp?arnumber=10053649 |
| Language | English |