Characterization of Thin ZnO Films by Vacuum Ultra-Violet Reflectometry
Gumprecht TG, Petrik PP, Roeder GR, Schellenberger MS, Pfitzner LP, Pollakowski BP, Beckhoff BBZink oxide, vacuum ultra-violet reflectometry, spectroscopic ellipsometry, atomic layer deposition
| Document type | Proceedings |
| Journal title / Source | Materials Research Society Proceedings |
| Peer-reviewed article | 1 |
| Volume | 1494 |
| Issue | Symposium F - Oxide Semiconductors and Thin Films |
| Page numbers / Article number | 65-70 |
| Publisher's name | Cambridge Journals Online |
| Publisher's address (city only) | Cambridge |
| Publication date | 2013 |
| Conference name | 2012 MRS Fall Meeting |
| Conference date | 25-11-2012 to 30-11-2012 |
| Conference place | Boston, Massachusetts |
| ISSN | 1946-4274 |
| DOI | 10.1557/opl.2012.1677 |
| Web URL | http://journals.cambridge.org/action/displayAbstract?fromPage=online&aid=8800651&fileId=S1946427412016776 |
| Language | English |