Characterization of thin film thickness
Pourjamal SP, Mäntynen HM, Jaanson PJ, Rosu DMR, Hertwig AH, Manoocheri FM, Ikonen EIDocument type | Article |
Journal title / Source | Metrologia |
Peer-reviewed article | 1 |
Volume | 51 |
Issue | 6 |
Page numbers / Article number | S302-S308 |
Publisher's name | IOP Publishing |
Publication date | 2014-11-20 |
ISSN | 0026-1394 |
DOI | 10.1088/0026-1394/51/6/S302 |
Web URL | http://iopscience.iop.org/article/10.1088/0026-1394/51/6/S302/meta |
Language | English |