High Temperature Thermal Conductivity of Amorphous Al2O3 Thin Films Grown by Low Temperature ALD
Cappella, Andrea, Battaglia, Jean-Luc, Schick, Vincent, Kusiak, Andrzej, Lamperti, Alessio, Wiemer, Claudia and Hay, BrunoALD, amorphous alumina, modulated photothermal radiometry, thermal conductivity
| Document type | Article |
| Journal title / Source | Advanced Engineering Materials |
| Publication date | 2013-08-6 |
| DOI | 10.1002/adem.201300132 |
| Language | English |