High Temperature Thermal Conductivity of Amorphous Al2O3 Thin Films Grown by Low Temperature ALD

Cappella Andrea, Battaglia Jean-Luc, Schick Vincent, Kusiak Andrzej, Lamperti Alessio, Wiemer Claudia, Hay Bruno

ALD, amorphous alumina, modulated photothermal radiometry, thermal conductivity

Document type Article
Journal title / Source Advanced Engineering Materials
Publication date 2013-8-6
DOI 10.1002/adem.201300132
Language English

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