Calibration and correction of a 6 degree of freedom piezo driven stage
Küng A., Nicolet A., Meli F.6 degrees of freedom stage, calibration, parallel cinematics, nano-positioning, multi-axis correction model
| Document type | Proceedings |
| Journal title / Source | Proceedings of the 16th international conference of the european society for precision engineering and nanotechnology (euspen) |
| Peer-reviewed article | 1 |
| Volume | 1 |
| Issue | P1.59 |
| Page numbers / Article number | 2 |
| Publisher's name | euspen |
| Publisher's address (city only) | Bedford |
| Publication date | 2016-5-30 |
| Conference name | 16th international conference of the european society for precision engineering and nanotechnology (euspen) |
| Conference date | May 30th – 3rd June 2016 |
| Conference place | Nottingham, UK |
| ISBN | 978-0-9566790-8-6 |
| Web URL | http://www.euspen.eu/Library/ProceedingsPresentations.aspx |
| Language | English |