Oxide Layer Mass Determination at the Silicon Sphere of the Avogadro Project
Busch Ingo, Danzebrink Hans-Ulrich, Kumrey Michael, Borys Michael, Bettin HorstAvogadro; density; ellipsometry; ?otation; silicon; silicon oxide; surface; X-ray re?ectometry (XRR)
| Document type | Article |
| Journal title / Source | IEEE Transactions on Instrumentation and Measurement |
| Volume | 58 |
| Issue | 4 |
| Page numbers / Article number | 891-896 |
| Publication date | 2009-4 |