Oxide Layer Mass Determination at the Silicon Sphere of the Avogadro Project

Busch Ingo, Danzebrink Hans-Ulrich, Kumrey Michael, Borys Michael, Bettin Horst

Avogadro; density; ellipsometry; ?otation; silicon; silicon oxide; surface; X-ray re?ectometry (XRR)

Document type Article
Journal title / Source IEEE Transactions on Instrumentation and Measurement
Volume 58
Issue 4
Page numbers / Article number 891-896
Publication date 2009-4

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