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Fast mechanical model for probe–sample elastic deformation estimation in scanning probe microscopy

Klapetek P., Charvátová Campbell A., Buršíková V.
Keywords:

Scanning Probe Microscopy,Uncertainty,Elastic deformation

Document type Article
Journal title / Source Ultramicroscopy
Volume 201
Page numbers / Article number 18-27
Publisher's name Elsevier BV
Publication date 2019-6
ISSN 0304-3991
DOI 10.1016/j.ultramic.2019.03.010
Web URL https://www.sciencedirect.com/science/article/pii/S0304399118302638
Language English

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Information

Project title (JRP)
15SIB09: 3DNano: Traceable three-dimensional nanometrology
Name of Call / Funding Programme
EMPIR 2015: SI Broader Scope