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Trinano N100 3D Measurements with Nanometer Repeatability and Effects of Probe-Surface Interaction

Bos, E., Moers, A. and van Riel, M.
Document typeProceeding
Journal title / SourceProceedings of the 27th Annual Meeting of the American Society for Precision Engineering
Volume54
Page numbers / Article number85-88
Publication date 2012
Conference name27th Annual Meeting of the American Society for Precision Engineering
Conference date21 - 26 October 2012
Conference placeSan Diego, CA USA
ISBN978-1-887706-61-2
LanguageEnglish

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