Trinano N100 3D Measurements with Nanometer Repeatability and Effects of Probe-Surface Interaction
Bos E., Moers A., van Riel M.| Document type | Proceedings |
| Journal title / Source | Proceedings of the 27th Annual Meeting of the American Society for Precision Engineering |
| Volume | 54 |
| Page numbers / Article number | 85-88 |
| Publication date | 2012 |
| Conference name | 27th Annual Meeting of the American Society for Precision Engineering |
| Conference date | 21 - 26 October 2012 |
| Conference place | San Diego, CA USA |
| ISBN | 978-1-887706-61-2 |