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Traceable low-current measurements for a novel ionization gauge suitable as reference standard

Bernien M., Götz M., Illgen C., Drung D., Krause C., Bock T., Jousten K.
Keywords:

Ionization vacuum gaugeSensitivityLow currentTraceable measurementsMetrology

Document type Article
Journal title / Source Measurement: Sensors
Volume 18
Issue December 2
Page numbers / Article number 100202
Publisher's name Elsevier Ltd
Publication date 2021
ISSN 2665-9174
DOI 10.1016/j.measen.2021.100202
Language English

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Information

Project title (JRP)
16NRM05: Ion gauge: Towards a documentary standard for an ionisation vacuum gauge
Name of Call / Funding Programme
EMPIR 2016: Pre-Co-Normative