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Traceable low-current measurements for a novel ionization gauge suitable as reference standard

Bernien M., Götz M., Illgen C., Drung D., Krause C., Bock T., Jousten K.

Ionization vacuum gaugeSensitivityLow currentTraceable measurementsMetrology

Document type Article
Journal title / Source Measurement: Sensors
Volume 18
Issue December 2
Page numbers / Article number 100202
Publisher's name Elsevier Ltd
Publication date 2021
ISSN 2665-9174
DOI 10.1016/j.measen.2021.100202
Language English

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Project title (JRP)
16NRM05: Ion gauge: Towards a documentary standard for an ionisation vacuum gauge
Name of Call / Funding Programme
EMPIR 2016: Pre-Co-Normative