BAYESIAN APPROACH TO THE STATISTICAL INVERSE PROBLEM OF SCATTEROMETRY: COMPARISON OF THREE SURROGATE MODELS
Heidenreich S., Gross H., Bär M.scatterometry, Bayesian inference, stochastic partial differential equations, collocation, inverse problem
| Document type | Article |
| Journal title / Source | International Journal for Uncertainty Quantification |
| Peer-reviewed article | 1 |
| Volume | 5 |
| Issue | 6 |
| Page numbers / Article number | 511–526 |
| Publisher's name | Begell House |
| Publisher's address (city only) | Danbury |
| Publication date | 2015-9-1 |
| ISSN | - |
| DOI | 10.1615/Int.J.UncertaintyQuantification.2015013050 |
| Web URL | - |
| Language | English |