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The EURAMET Repository Link is an online service providing links to scientific papers published within the European Metrology Research Programme (EMRP), the European Metrology Programme for Innovation and Research (EMPIR) and projects funded by iMERA-Plus.

A hybrid 2D/3D inspection concept with smart routing optimisation for high throughput, high dynamic range and traceable critical dimension metrology

Jones, C.W. and O’Connor, D (National Physical Laboratory, Teddington, United Kingdom)

dimensional metrology, surface topography, hybrid measurement, high dynamic range, process control, inline measurement, calibration

Document typeArticle
Journal title / SourceMeasurement Science and Technology
Page numbers / Article number074004
Publisher's nameIOP Publishing
Publication date 2018-05-23
ISSN0957-0233, 1361-6501
Web URLhttp://iopscience.iop.org/article/10.1088/1361-6501/aababd/meta

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