Measurement of aspheres and free-form surfaces in a non-null test interferometer: Reconstruction of high-frequency errors

Baer G., Schindler J., Siepmann J., Pruß C., Osten W., Schulz M.
Document type Proceedings
Journal title / Source Proceedings of SPIE 8788: Optical Measurement Systems for Industrial Inspection VIII
Volume VIII
Publication date 2013
Conference name SPIE Optifab 2013
Conference date 13 May 2013
Conference place München, Germany
DOI 10.1117/12.2021518

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