Correction of misalignment introduced aberration in non-null test measurements of free-form surfaces

Baer G., Schindler J., Pruss C., Osten W.
Keywords:

Metrology, Aspheres, Free-Forms, Tilted-Wave-Interferometer, Non-Null, Alignment

Document type Article
Journal title / Source Journal of the European Optical Society Rapid Publications
Volume 8
Issue 13074
Publication date 2013
ISSN 1990-2573
DOI 10.2971/jeos.2013.13074
Web URL https://www.jeos.org/index.php/jeos_rp/article/view/13074

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