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Gas modulation refractometry for high-precision assessment of pressure under non-temperature-stabilized conditions

Silander I., Hausmaninger T., Zelan M., Axner O.
Keywords:

GAs modulation refractometry, Fabry Perot cavity refractometry

Document type Article
Journal title / Source Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Volume 36
Issue 3
Page numbers / Article number 03E105
Publisher's name American Vacuum Society
Publication date 2018-5
ISSN 0734-2101, 1520-8559
DOI 10.1116/1.5022244
Language English

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Information

Project title (JRP)
14IND06: pres2vac: Industrial standards in the intermediate pressure-to-vacuum range
Name of Call / Funding Programme
EMPIR 2014: Industry