110 GHz on-wafer measurement comparison on alumina substrate

Arz U., Lazar R. , Doerner R. , Ohlrogge M. , Probst T.

Calibration, Ceramics, Probes, Metals, Substrates, Frequency measurement, Geometry, alumina, measurement standards, microwave measurement, network analysers, S-parameters devices under tests, measurement configurations, alumina calibration substrate, calibrations, probe geometry, measurement system, highly accurate multiline TRL calibration, vector network analyzer measurement, frequency 110.0 GHz, Al2O3, on-wafer, substrate

Document type Article
Journal title / Source ARFTG Microwave Measurement Symposium (ARFTG), 2017 Nov 28th - Dec 1st
Publisher's name IEEE
Publication date 2018-1-15
DOI 10.7795/EMPIR.14IND02.CA.20190403A
Web URL https://doi.org/10.1109/ARFTG.2017.8255867
Language English

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