Application of the metrological SPM for long distance measurements

Vorbringer-Dorozhovets N., Fuessl R., Manske E.
Keywords:

nanopositioning and nanomeasuring machine, metrological scanning probe microscope, SPM, AFM, long distance measurements

Document type Proceedings
Journal title / Source Shaping the future by engineering : 58th IWK, Ilmenau Scientific Colloquium, Technische Universität Ilmenau, 8 - 12 September 2014 ; proceedings
Volume 2014
Page numbers / Article number 158
Publisher's name TU-Ilmenau
Publication date 2015
Conference name 58th Ilmenau Scientific Colloquium
Conference date September 8-12, 2014
Conference place Ilmenau, Germany
Web URL http://www.db-thueringen.de/servlets/DocumentServlet?id=24940
Language English
Persistent Identifier http://nbn-resolving.de/urn:nbn:de:gbv:ilm1-2014iwk-158:6

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