Application of the metrological SPM for long distance measurements
Vorbringer-Dorozhovets N., Fuessl R., Manske E.nanopositioning and nanomeasuring machine, metrological scanning probe microscope, SPM, AFM, long distance measurements
Document type | Proceedings |
Journal title / Source | Shaping the future by engineering : 58th IWK, Ilmenau Scientific Colloquium, Technische Universität Ilmenau, 8 - 12 September 2014 ; proceedings |
Volume | 2014 |
Page numbers / Article number | 158 |
Publisher's name | TU-Ilmenau |
Publication date | 2015 |
Conference name | 58th Ilmenau Scientific Colloquium |
Conference date | September 8-12, 2014 |
Conference place | Ilmenau, Germany |
Web URL | http://www.db-thueringen.de/servlets/DocumentServlet?id=24940 |
Language | English |
Persistent Identifier | http://nbn-resolving.de/urn:nbn:de:gbv:ilm1-2014iwk-158:6 |