Application of the metrological SPM for long distance measurements
Vorbringer-Dorozhovets N., Fuessl R., Manske E.nanopositioning and nanomeasuring machine, metrological scanning probe microscope, SPM, AFM, long distance measurements
| Document type | Proceedings |
| Journal title / Source | Shaping the future by engineering : 58th IWK, Ilmenau Scientific Colloquium, Technische Universität Ilmenau, 8 - 12 September 2014 ; proceedings |
| Volume | 2014 |
| Page numbers / Article number | 158 |
| Publisher's name | TU-Ilmenau |
| Publication date | 2015 |
| Conference name | 58th Ilmenau Scientific Colloquium |
| Conference date | September 8-12, 2014 |
| Conference place | Ilmenau, Germany |
| Web URL | http://www.db-thueringen.de/servlets/DocumentServlet?id=24940 |
| Language | English |
| Persistent Identifier | http://nbn-resolving.de/urn:nbn:de:gbv:ilm1-2014iwk-158:6 |