Aperture alignment in autocollimator-based deflectometric profilometers
Geckeler R. D., Artemiev N. A., Barber S. K., Just A, Lacey I., Kranz O, Smith B. V., Yaschckuk V. V.Apertures, Calibration Charge coupled devices, Ray tracing, Optical aberrations
| Document type | Article |
| Journal title / Source | REVIEW OF SCIENTIFIC INSTRUMENTS |
| Peer-reviewed article | 1 |
| Volume | 87 |
| Issue | 051906 (2016) |
| Page numbers / Article number | 1-9 |
| Publisher's name | American Institute of Physics |
| Publisher's address (city only) | Melville, NY 11747-4300 USA |
| Publication date | 2016-5-24 |
| ISSN | Print: 0034-6748, Online: 1089-7623 |
| DOI | 10.1063/1.4950734 |
| Web URL | http://aip.scitation.org/doi/10.1063/1.4950734 |
| Language | English |