Hybrid Metrology for Nanostructured Optical Metasurfaces
Angelini A., Castellino M., Boarino L., Carignano S., Fernandez-Regulez M., Perez-Murano F., Soltwisch V., Gollwitzer C., Ciesielski R., Hönicke P., Kayser Y., Beckhoff B., Porro S., Cara E., Murataj I., Ferrarese Lupi F.Block Copolymers Sequential Infiltration Synthesis Grazing Incidence X-ray Fluorescence Grazing Incidence Small Angle X-ray Scattering Synchrotron Radiation
| Document type | Article |
| Journal title / Source | ACS Applied Materials & Interfaces |
| Volume | 15 |
| Issue | 50 |
| Page numbers / Article number | 57992-58002 |
| Publisher's name | American Chemical Society (ACS) |
| Publisher's address (city only) | Washington, DC, United States |
| Publication date | 2023-11-22 |
| ISSN | 1944-8244, 1944-8252 |
| DOI | 10.1021/acsami.3c13923 |
| Language | English |