Hybrid Metrology for Nanostructured Optical Metasurfaces
Angelini A., Castellino M., Boarino L., Carignano S., Fernandez-Regulez M., Perez-Murano F., Soltwisch V., Gollwitzer C., Ciesielski R., Hönicke P., Kayser Y., Beckhoff B., Porro S., Cara E., Murataj I., Ferrarese Lupi F.Block Copolymers Sequential Infiltration Synthesis Grazing Incidence X-ray Fluorescence Grazing Incidence Small Angle X-ray Scattering Synchrotron Radiation
Document type | Article |
Journal title / Source | ACS Applied Materials & Interfaces |
Volume | 15 |
Issue | 50 |
Page numbers / Article number | 57992-58002 |
Publisher's name | American Chemical Society (ACS) |
Publisher's address (city only) | Washington, DC, United States |
Publication date | 2023-11-22 |
ISSN | 1944-8244, 1944-8252 |
DOI | 10.1021/acsami.3c13923 |
Language | English |