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Modelling laser interferometers for the measurement of the Avogadro constant

Andreas Birk, Mana Giovanni, Massa Enrico, Palmisano Carlo
Keywords:

Interferometry, optics simulation, metrology, measurement uncertainty, diffraction.

Document type Proceedings
Journal title / Source SPIE Proceedings
Volume 8789
Publication date 2013
Conference name SPIE Optical Metrology
Conference date 13 to 14 May 2013
Conference place Munich
ISSN 0277-786X
DOI 10.1117/12.2020282
Web URL http://spie.org/Publications/Proceedings/Paper/10.1117/12.2020282

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Information

Project title (JRP)
SIB08: subnano: Traceability of sub-nm length measurements
Name of Call / Funding Programme
EMRP A169: Call 2011 SI Broader Scope