Area-Selective Growth of Zinc Oxide Nanowire Arrays for Piezoelectric Energy Harvesting
Anang F.E.Boye, Wei X., Xu J., Cain M., Li Z., Brand U., Peiner E.area-selective growth, ZnO nanowire arrays, MEMS, CBD growth, SU-8 polymer, PENG
| Document type | Article |
| Journal title / Source | Micromachines |
| Volume | 15 |
| Issue | 2 |
| Page numbers / Article number | 261 |
| Publisher's name | MDPI AG |
| Publisher's address (city only) | Basel, Switzerland |
| Publication date | 2024-2-10 |
| ISSN | 2072-666X |
| DOI | 10.3390/mi15020261 |
| Web URL | https://www.mdpi.com/2072-666X/15/2/261 |
| Language | English |