Analytical modeling and three-dimensional finite element simulation of line edge roughness in scatterometry
Kato A., Burger S., Scholze F.| Document type | Article |
| Journal title / Source | APPLIED OPTICS |
| Volume | 51 |
| Issue | 27 |
| Page numbers / Article number | 6457 - 6464 |
| Publication date | 2012-9-11 |
| DOI | 10.1364/AO.51.006457 |
| Language | English |