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An active reference spring array for in-situ calibration of the normal spring constant of AFM cantilevers

Gao S., Brand U., Hahn S., Hiller K.
Keywords:

Calibration ; Microelectromechanical systems ; Reactive ion etching ; Simulations ; Fabrication

Document type Proceedings
Journal title / Source Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 951719 (May 21, 2015); doi:10.1117/12.2178850; http://dx.doi.org/10.1117/12.2178850
Volume Proc. SPIE 9517
Issue Proc. SPIE 9517
Page numbers / Article number 951719
Publisher's name SPIE
Publication date 2015-5-21
Conference name Smart Sensors, Actuators, and MEMS VII and Cyber Physical Systems
Conference date 2015-May-04
Conference place Barcelona, Spain
DOI 10.1117/12.2178850
Language English

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Information

Project title (JRP)
NEW05: MechProNO: Traceable measurement of mechanical properties of nano-objects
Name of Call / Funding Programme
EMRP A169: Call 2011 Metrology for New Technologies