An active reference spring array for in-situ calibration of the normal spring constant of AFM cantilevers
Gao S., Brand U., Hahn S., Hiller K.Calibration ; Microelectromechanical systems ; Reactive ion etching ; Simulations ; Fabrication
| Document type | Proceedings |
| Journal title / Source | Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 951719 (May 21, 2015); doi:10.1117/12.2178850; http://dx.doi.org/10.1117/12.2178850 |
| Volume | Proc. SPIE 9517 |
| Issue | Proc. SPIE 9517 |
| Page numbers / Article number | 951719 |
| Publisher's name | SPIE |
| Publication date | 2015-5-21 |
| Conference name | Smart Sensors, Actuators, and MEMS VII and Cyber Physical Systems |
| Conference date | 2015-May-04 |
| Conference place | Barcelona, Spain |
| DOI | 10.1117/12.2178850 |
| Language | English |