Alternative methods for uncertainty evaluation in EUV scatterometry
Heidenreich S, Henn M-A, Gross H, Bodermann B, Bär MUncertainty quantifcation, Difraction gratings, Metrology
| Document type | Proceedings |
| Journal title / Source | Proc. SPIE 8789, Modeling Aspects in Optical Metrology IV, 87890T (May 13, 2013); doi:10.1117/12.2020677 |
| Peer-reviewed article | 1 |
| Volume | 8789 |
| Issue | 2013 |
| Page numbers / Article number | - |
| Publisher's name | International Society for Optics and Photonics |
| Publisher's address (city only) | Bellingham |
| Publication date | 2013-5-13 |
| Conference name | Modeling Aspects in Optical Metrology IV |
| Conference date | 13-05-2013 |
| Conference place | Munich |
| ISSN | - |
| DOI | 10.1117/12.2020677 |
| ISBN | - |
| Web URL | http://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1687372 |
| Language | English |