A virtual lateral standard for AFM calibraion

Koops R., van Veghel M., van de Nes A.
Keywords:

Nanoscale production; Lateral AFM calibration; Virtual standard; Traceability; Measurement uncertainty; Non-linearity

Document type Article
Journal title / Source Microelectronic Engineering
Peer-reviewed article 1
Volume 153
Issue 5 March 2016
Page numbers / Article number pp 29-36
Publisher's name Elsevier
Publication date 2016-3-5
DOI 10.1016/j.mee.2016.01.010
Language English

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