A surrogate model enables a Bayesian approach to the inverse problem of scatterometry

Heidenreich S, Gross H, Henn M-A, Elster C, Bär M

scatterometry, photomask geometry, surrogate model, polynomial chaos

Document type Article
Journal title / Source Journal of Physics: Conference Series
Peer-reviewed article 1
Volume 490
Issue -
Page numbers / Article number 012007
Publisher's name IOPScience
Publisher's address (city only) Bristol & Philadelphia
Publication date 2014-3-11
DOI 10.1088/1742-6596/490/1/012007
Web URL http://iopscience.iop.org/article/10.1088/1742-6596/490/1/012007/pdf
Language English

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