A maximum likelihood approach to the inverse problem of scatterometry
Henn M.-A., Gross H., Scholze F., Wurm M., Elster C., Baer M.Diffraction gratings, Metrology
| Document type | Article |
| Journal title / Source | OPTICS EXPRESS |
| Peer-reviewed article | 1 |
| Volume | 20 |
| Issue | 12 |
| Page numbers / Article number | 12771 - 12786 |
| Publication date | 2012-5-23 |
| DOI | 10.1364/OE.20.012771 |
| Web URL | https://www.osapublishing.org/oe/abstract.cfm?uri=oe-20-12-12771 |
| Language | English |