A dedicated calibration standard for nanoscale areal surface texturemeasurements
Koops R, van Veghel M, van de Nes ATraceability Calibration standard Areal surface texture Sq Measurement uncertainty
| Document type | Article |
| Journal title / Source | Microelectronic Engineering |
| Peer-reviewed article | 1 |
| Volume | 141 |
| Issue | 2015 |
| Page numbers / Article number | 250-255 |
| Publisher's name | Elsevier |
| Publication date | 2015 |
| DOI | 10.1016/j.mee.2015.04.021 |
| Language | English |