A compact new-concept ellipsometer for accurate large scale thin films measurements
Koops RK, Sonin PS, Veghel MV, El Gawhary OEGellipsometry, thin films, large area
Document type | Article |
Journal title / Source | Journal of Optics |
Peer-reviewed article | 1 |
Volume | 16 |
Issue | 6 |
Publisher's name | IOP Publishing Ltd |
Publication date | 2014-5-8 |
ISSN | 2040-8978 |
DOI | 10.1088/2040-8978/16/6/065701 |
Web URL | http://iopscience.iop.org/article/10.1088/2040-8978/16/6/065701/meta |
Language | English |