A compact new-concept ellipsometer for accurate large scale thin films measurements

Koops RK, Sonin PS, Veghel MV, El Gawhary OEG

ellipsometry, thin films, large area

Document type Article
Journal title / Source Journal of Optics
Peer-reviewed article 1
Volume 16
Issue 6
Publisher's name IOP Publishing Ltd
Publication date 2014-5-8
ISSN 2040-8978
DOI 10.1088/2040-8978/16/6/065701
Web URL http://iopscience.iop.org/article/10.1088/2040-8978/16/6/065701/meta
Language English

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