A compact new-concept ellipsometer for accurate large scale thin films measurements
Koops RK, Sonin PS, Veghel MV, El Gawhary OEGellipsometry, thin films, large area
| Document type | Article |
| Journal title / Source | Journal of Optics |
| Peer-reviewed article | 1 |
| Volume | 16 |
| Issue | 6 |
| Publisher's name | IOP Publishing Ltd |
| Publication date | 2014-5-8 |
| ISSN | 2040-8978 |
| DOI | 10.1088/2040-8978/16/6/065701 |
| Web URL | http://iopscience.iop.org/article/10.1088/2040-8978/16/6/065701/meta |
| Language | English |