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Complex Refractive Index of Indium Tin Oxide Thin Films obtained by Variable Angle Spectroscopic Ellipsometry

Keywords:

Complex Refractive Index, Thin Films, Variable Angle Spectroscopic Ellipsometry

Document type Datasets
Journal title / Source
Publication date 2024-3
DOI 10.5281/zenodo.10790102
Language English

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Information

Project title (JRP)
20IND04: ATMOC: Traceable metrology of soft X-ray to IR optical constants and nanofilms for advanced manufacturing
Name of Call / Funding Programme
EMPIR 2020: Industry