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The EURAMET Repository Link is an online service providing links to scientific papers published within the European Metrology Research Programme (EMRP), the European Metrology Programme for Innovation and Research (EMPIR) and projects funded by iMERA-Plus.

Higher-Mode Contact Resonance Operation of a High-Aspect- Ratio Piezoresistive Cantilever Microprobe (Data)

Keywords:

MEMS, microprobe, thermal actuator, piezoresistive cantilever, contact resonance

Document typeDatasets
Persistent Identifierhttps://zenodo.org/record/4495100

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