Short Name: TracOptic, Project Number: 20IND07

Traceable industrial 3D roughness and dimensional measurement using optical 3D microscopy and optical distance sensors

Developing methods and guidance to support use of optical surface measurement technologies in advanced manufacturing processes

Image showing an artists concept of a 3D surface closeup

Surface slope measurement of steep silicon V-grooves using high NA Linnik interferometry
2025

Surface Topography: Metrology and Properties

Comparison of rigorous scattering models to accurately replicate the behaviour of scattered electromagnetic waves in optical surface metrology
2025

Journal of Computational Physics

SurfILE: An Open-Source Python Package for Surface Topography Analysis
2024

Metrology

Linear systems characterization of the topographical spatial resolution of optical instruments
2024

Applied Optics

Precision of diamond turning sinusoidal structures as measurement standards used to assess topography fidelity
2024

Surface Topography: Metrology and Properties

Comparison of Fourier optics-based methods for modeling coherence scanning interferometry
2024

Optical Engineering

Electromagnetic modeling of interference, confocal, and focus variation microscopy
2024

Advanced Photonics Nexus

Neural Network Approach for Modelling and Compensation of Local Surface-Tilting-Dependent Topography Measurement Errors in Coherence Scanning Interferometry
2024

Metrology

Simulation of realistic speckle fields by using surface integral equation and multi-level fast multipole method
2023

Optics and Lasers in Engineering

Harvey Schack theory for converging-diverging Gaussian beam
2023

Rigorous modeling of a confocal microscope
2023

Modeling Aspects in Optical Metrology IX

Physically based rendering method to derive realistic simulation of chromatic confocal measurements
2023

Modeling Aspects in Optical Metrology IX

Scientific modeling of optical 3D measuring devices based on GPU-accelerated ray tracing using the NVIDIA OptiX Engine
2023

Modeling Aspects in Optical Metrology IX

Comparison of coherence scanning interferometry, focus variation and confocal microscopy for surface topography measurement
2023

euspen’s 23rd International Conference & Exhibition

Towards task-specific uncertainty assessment for imaging confocal microscopes
2023

Proceedings 23rd euspen International Conference and Exhibition

Harvey-Shack theory for converging-diverging Gaussian beam
2023

Journal of the Optical Society of America B

A virtual microscope for simulation of Nanostructures
2022

EPJ Web of Conferences

Effect of a Misidentified Centre of a Type ASG Material Measure on the Determined Topographic Spatial Resolution of an Optical Point Sensor
2022

Metrology

Modeling of coherence scanning interferometry using classical Fourier optics
2021

Optical Engineering

Fourier optics modelling of coherence scanning interferometers
2021

Applied Optical Metrology IV - Proc. of SPIE

Monte-Carlo Simulation for the measurement uncertainty determination of stitching procedure in optical metrology
0

Dataset of the determination of the topographic spatial resolution of a confocal point sensor with a type ASG material measure
0

Three-Dimensional Transfer Functions of Interference Microscopes [Dataset]
0

Metrology

Simulated images and profiles
0

Dataset for 'Comparison of coherence scanning interferometry, focus variation and confocal microscopy for surface topography measurement'
0

Dataset for the uncertainty assessment of confocal measurements of industrial samples
0

Participating EURAMET NMIs and DIs

CEM (Spain)

DFM (Denmark)

GUM (Poland)

INRiM (Italy)

LNE (France)

MIKES (Finland)

PTB (Germany)

RISE (Sweden)

VSL (Netherlands)

Other Participants

Alicona Imaging GmbH (Austria)
Cen​tro Ricerche Fiat S.C.p.A. (Italy)
Friedrich-Alexander-Universität Erlangen - Nürnberg (Germany)
Fundacion Tekniker (Spain)
Gesellschaft für Bild- und Signalverarbeitung (GBS) mbH (Germany)
OST Ostschweizer Fachhochschule (Switzerland)
Technische Universitaet Chemnitz (Germany)
Technische Universitaet Clausthal (Germany)
Technische Universität Kaiserslautern (Germany)
The University of Nottingham (United Kingdom)
twip optical solutions GmbH (Germany)
Universitaet Kassel (Germany)
Universitaet Leipzig (Germany)
Universitaet Stuttgart (Germany)
Zygo Corporation (United States)

Information

Programme
EMPIR
Field
Industry
Status
completed
Call
2020
Duration
2021-2024
Project website
Link