Publications

The effect of line roughness on DUV scatterometry.

Henn M.-A., Heidenreich S., Groß H., Bodermann B., Baer M.

2015

Proc SPIE 8789 (2015)

Type:: Proceedings
Project title:: IND17: Scatterometry: Metrology of small structures for the manufacturing of electronic and optical devices
Name of Call / Funding Programme:: EMRP A169: Call 2010 Industry
DOI: 10.1117/12.2020761

Nanometrology on Gratings with GISAXS: FEM Reconstruction and Fourier Analysis

Soltwisch V., Wernecke J., Haase A., Probst J., Schoengen M., Krumrey M., Scholze F.

2015

Proc SPIE (2015)

Type:: Proceedings
Project title:: IND17: Scatterometry: Metrology of small structures for the manufacturing of electronic and optical devices
Name of Call / Funding Programme:: EMRP A169: Call 2010 Industry
DOI: 10.1117/12.2046212

Measurement comparison of goniometric scatterometry and coherent Fourier scatterometry

Endres J., Kumar N., Petrik P., Henn M.-A., Heidenreich S., Pereira S. F., Urbach H. P., Bodermann B.

2015

Proc SPIE 9132 (2015)

Type:: Proceedings
Project title:: IND17: Scatterometry: Metrology of small structures for the manufacturing of electronic and optical devices
Name of Call / Funding Programme:: EMRP A169: Call 2010 Industry
DOI: 10.1117/12.2052819

From Real-Time SAR Assessment to Temperature Distributions in Coronary Stents at 7T

Winter Lukas, Oberacker Eva, Özerdem Celal, Ji Yiyi, von Knobelsdorff-Brenkenhoff Florian, Weidemann Gerd, Ittermann Bernd, Seifert Frank, Niendorf Thoralf

2015

Proc. Intl. Soc. Mag. Reson. Med. 23 (2015)

Type:: Proceedings
Project title:: HLT06: MRI safety: Metrology for next-generation safety standards and equipment in MRI
Name of Call / Funding Programme:: EMRP A169: Call 2011 Metrology for Health

Fibre optics wavemeters calibration using a self-referenced optical frequency comb

Galindo-Santos J., Velasco A. V., Corredera P.

2015

Review of Scientific Instruments 86 (2015)

Type:: Article
Project title:: IND14: Frequency: New generation of frequency standards for industry
Name of Call / Funding Programme:: EMRP A169: Call 2010 Industry
DOI: 10.1063/1.4904973

Development of a scatterometry reference standard

Bodermann B., Loechel B., Scholze F., Dai G., Wernecke J., Endres J., Probst J., Schoengen M., Krumrey M., Hansen P.-E., Soltwisch V.

2015

Proc SPIE 9132 (2015)

Type:: Proceedings
Project title:: IND17: Scatterometry: Metrology of small structures for the manufacturing of electronic and optical devices
Name of Call / Funding Programme:: EMRP A169: Call 2010 Industry
DOI: 10.1117/12.2052278

Determination of line profiles on photomasks using DUV, EUV and X-ray scattering

Scholze F., Bodermann B., Burger S., Endres J., Haase A., Krumrey M., Laubis C., Soltwisch V., Ullrich A., Wernecke J.

2015

Proc SPIE 9231 (2015)

Type:: Proceedings
Project title:: IND17: Scatterometry: Metrology of small structures for the manufacturing of electronic and optical devices
Name of Call / Funding Programme:: EMRP A169: Call 2010 Industry
DOI: 10.1117/12.2065941

Correlation of psSAR and tissue specific temperature for 7T pTx head coils - a large scale simulation study

Seifert Frank, Weidemann Gerd, Ittermann Bernd

2015

Proc. Intl. Soc. Mag. Reson. Med. 23 (2015)

Type:: Proceedings
Project title:: HLT06: MRI safety: Metrology for next-generation safety standards and equipment in MRI
Name of Call / Funding Programme:: EMRP A169: Call 2011 Metrology for Health

Fourier ellipsometry – an ellipsometric approach to Fourier scatterometry

Petrik P., Kumar N., Fried M., Fodor B., Juhasz G., Pereira S.E., Burger S., Urbach H. P.

2015

JEOS 10 (2015)

Type:: Article
Project title:: IND17: Scatterometry: Metrology of small structures for the manufacturing of electronic and optical devices
Name of Call / Funding Programme:: EMRP A169: Call 2010 Industry
DOI: 10.2971/jeos.2015.15002

Chapter 6 “ Metrology for Vector Network Analyzers (VNA)"

Clarke R. G., Ridler N. M.

2015

N/A (2015) , 185-250

Type:: Contribution to book
Project title:: SIB62: HFCircuits: Metrology for new electrical measurement quantities in high-frequency circuits
Name of Call / Funding Programme:: EMRP A169: Call 2012 SI Broader scope (II)