Publications

Please find below selected publications from EURAMET's European Metrology Research Programmes (EMRP and EMPIR) and the Metrology Partnership that are related to Clean Energy:

A surrogate model enables a Bayesian approach to the inverse problem of scatterometry

Heidenreich S, Gross H, Henn M-A, Elster C, Bär M
2014

Journal of Physics: Conference Series 490 (2014) , 012007

Type:
Article
Project title:
NEW04: Uncertainty: Novel mathematical and statistical approaches to uncertainty evaluation
Name of Call / Funding Programme:
EMRP A169: Call 2011 Metrology for New Technologies
DOI
10.1088/1742-6596/490/1/012007

Improved reconstruction of critical dimensions in exteme ultraviolet scatterometry by modellig systematic errors

Henn M-A, Gross H, Heidenreich S, Scholze F, Elster C, Bär M
2014

Measurement Science and Technology 25 (2014) , 044003 (9pp)

Type:
Article
Project title:
NEW04: Uncertainty: Novel mathematical and statistical approaches to uncertainty evaluation
Name of Call / Funding Programme:
EMRP A169: Call 2011 Metrology for New Technologies
DOI
10.1088/0957-0233/25/4/044003

Setup of a high-precision profilometer and comparison of tactile and optical measurements of standards

Nouira H, Salgado J-A, El-Hayek N, Ducourtieux S, Delvallée A, Anwer N
2014

Measurement Science and Technology 25 (2014)

Type:
Article
Project title:
IND10: Form metrology: Optical and tactile metrology for absolute form characterization
Name of Call / Funding Programme:
EMRP A169: Call 2010 Industry
DOI
10.1088/0957-0233/25/4/044011

Investigations of the influence of common approximations in scatterometry for dimensional nanometrology

Endres J., Diener A., Wurm M., Bodermann B.
2014

Measurement Science and Technology 25 (2014)

Type:
Article
Project title:
IND17: Scatterometry: Metrology of small structures for the manufacturing of electronic and optical devices
Name of Call / Funding Programme:
EMRP A169: Call 2010 Industry
DOI
10.1088/0957-0233/25/4/044004

Measurements of CD and sidewall profile of EUV photomask structures using CD-AFM and Tilting-AFM

Gaoliang D., Hahm K., Scholze F., Henn M.-A., Gross H., Fluegge J., Bosse H.
2014

Meas. Sci. Technol. 25 (2014)

Type:
Article
Project title:
IND17: Scatterometry: Metrology of small structures for the manufacturing of electronic and optical devices
Name of Call / Funding Programme:
EMRP A169: Call 2010 Industry
DOI
10.1088/0957-0233/25/4/044002

In-situ nondestructive characterization of the normal spring constant of AFM cantilevers

Gao Sai, Brand Uwe
2014

Measurement Science and Technology 25 (2014)

Type:
Article
Project title:
NEW05: MechProNO: Traceable measurement of mechanical properties of nano-objects
Name of Call / Funding Programme:
EMRP A169: Call 2011 Metrology for New Technologies
DOI
10.1088/0957-0233/25/4/044014

Scatterometer for characterization of diffractive optical elements

Husu H., Saastamoinen T., Laukkanen J., Siitonen S., Turunen J., Lassila A.
2014

Measurement Science and Technology 25 (2014)

Type:
Article
Project title:
IND17: Scatterometry: Metrology of small structures for the manufacturing of electronic and optical devices
Name of Call / Funding Programme:
EMRP A169: Call 2010 Industry
DOI
10.1088/0957-0233/25/4/044019

Magnetothermoelectric figure of merit of Co/Cu multilayers

Hu X. K., Krzysteczko P., Liebing N., Serrano-Guisan S., Rott K., Reiss G., Kimling J., Böhnert T., Nielsch K., Schumacher H. W.
2014

APPLIED PHYSICS LETTERS 104 (2014)

Type:
Article
Project title:
EXL04: SpinCal: Spintronics and spin-caloritronics in magnetic nanosystems
Name of Call / Funding Programme:
EMRP A169: Call 2012 Open excellence call
DOI
10.1063/1.4867700

Towards quantitative modelling of surface deformation of polymer micro-structures under tactile scanning measurement

Li ZL, Brand UB, Ahbe TA
2014

Measurement Science and Technology 25 (2014) , 044010

Type:
Article
Project title:
IND05: MeProVisc: Dynamic Mechanical Properties and Long-term Deformation Behaviour of Viscous Materials
Name of Call / Funding Programme:
EMRP A169: Call 2010 Industry
DOI
10.1088/0957-0233/25/4/044010

Optical mirror referenced capacitive flatness measurement and straightness evaluation of translation stages

Kren P.
2014

Measurement Science and Technology 25 (2014) , 5pp

Type:
Article
Project title:
IND10: Form metrology: Optical and tactile metrology for absolute form characterization
Name of Call / Funding Programme:
EMRP A169: Call 2010 Industry
DOI
10.1088/0957-0233/25/4/044017