Raw measurements data of piezo actuator displacements, in a form of a groove pattern, obtained with a laser interferometer and a roundness instrument
Trych-Wildner A., Wildner K., Sosinowski P.calibration; roundness; step height standard; piezo actuator; interferometer
| Document type | Datasets |
| Journal title / Source | |
| DOI | 10.5281/zenodo.7297897 |
| Language | English |