Self-excited Contact Resonance Operation of a Tactile Piezoresistive Cantilever Microprobe with Diamond Tip (Data)

Keywords:

MEMS, microprobe, thermal actuator, piezoresistive cantilever, contact resonance

Document type Datasets
Journal title / Source
DOI 10.5281/zenodo.5703351
Language English

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Information

Project title (JRP)
17IND05: MicroProbes: Multifunctional ultrafast microprobes for on-the-machine measurements
Name of Call / Funding Programme
EMPIR 2017: Industry