Dataset for 'Comparison of coherence scanning interferometry, focus variation and confocal microscopy for surface topography measurement'
Coherence scanning interferometry, confocal microscopy, focus variation, surface topography
| Document type | Datasets |
| Journal title / Source | |
| DOI | 10.5281/zenodo.10365872 |
| Web URL | https://zenodo.org/records/10365872 |