Determination of SiO2 and C layers on a monocrystalline silicon sphere by reference-free x-ray fluorescence analysis
Unterumsberger R., Pollakowski-Herrmann B., Lubeck J., Kolbe M., Holfelder I., Hönicke P, Weser J., Beckhoff B.Avogadro project, X-ray fluorescence, quantification
Document type | Article |
Journal title / Source | Metrologia |
Volume | 54 |
Issue | 4 |
Page numbers / Article number | 481-486 |
Publisher's name | IOP Publishing |
Publication date | 2017-6-28 |
ISSN | 0026-1394, 1681-7575 |
DOI | 10.1088/1681-7575/aa765f |
Language | English |