Investigation of error compensation in CGH-based form testing of aspheres
Stuerwald Stephan, Schmitt RobertComputer holography, metrology, measurement, Nondestructive testing
Document type | Proceedings |
Journal title / Source | |
Volume | 9132 |
Page numbers / Article number | 91320H-91320H-10 |
Publication date | 2014-5-1 |
Conference name | Optical Micro- and Nanometrology V |
Conference place | San Francisco |
DOI | 10.1117/12.2052968 |