High accuracy flatness metrology within the European Metrology Research Program
Schulz M., Ehret G., Kren P.Document type | Proceedings |
Journal title / Source | Nuclear Instruments and Methods in Physics Research A |
Volume | 710 |
Page numbers / Article number | 37-41 |
Publisher's name | Elsevier |
Publisher's address (city only) | Amsterdam, Netherlands |
Publication date | 2013 |
Conference name | 4th International Workshop on Metrology for X-ray Optics, Mirror Design and Fabrication |
Conference date | 4 - 6 July 2012 |
Conference place | Barcelona, Spain |
ISSN | 0168-9002 |
DOI | 10.1016/j.nima.2012.10.112 |