Performance verification of a dual sensor stage
Yacoot A., Mountford J., Tedaldi M., Reid B., Levy S.nanopositioning, nanometrology, optical interferometry
| Document type | Proceedings |
| Journal title / Source | Proceedings of the 14th euspen International Conference – Dubrovnik – June 2014 |
| Peer-reviewed article | 1 |
| Volume | I |
| Page numbers / Article number | P4.38, 309V1 |
| Publisher's name | EUSPEN |
| Publisher's address (city only) | Bedford |
| Publication date | 2014 |
| Conference name | 14th international conference of the european society for precision engineering and nanotechnology |
| Conference date | June 2-6, 2014 |
| Conference place | Dubrovnik, Croatia |
| ISBN | 978-0-9566790-3-1 |
| Web URL | http://www.euspen.eu/Portals/0/Content/2000-2013/Resources/Proceedings/2014%20Dubrovnik%20Contents%20Pages.pdf |
| Language | English |